1/5/2012	6:32:46 PM	Main Vac valve closed
1/5/2012	6:32:51 PM	PHl3 MFC set to  20.000000
1/5/2012	6:32:58 PM	PH3 valve opened
1/5/2012	6:45:28 PM	Helium MFC set to  50.000000
1/5/2012	6:45:29 PM	Helium valve opened
1/5/2012	6:48:46 PM	Helium MFC set to  100.000000
1/5/2012	6:49:10 PM	Bubbler valve opened
1/5/2012	7:32:04 PM	Bubbler valve closed
1/5/2012	7:32:05 PM	PH3 valve closed
1/5/2012	7:32:07 PM	Helium valve closed
1/5/2012	7:32:08 PM	PH3 valve opened
1/5/2012	7:32:09 PM	Bypass valve opened
1/5/2012	8:02:23 PM	Bypass valve closed
1/5/2012	8:02:24 PM	Main Vac valve opened
